February 2006

Cover Story

MEMS sensor
To be equipped on mobile phones in large numbers

Special Report

Proposals for the revitalization of Japan (3): An opinion on education

From a shortsighted training for immediately producing a readily deployable workforce to an education that develops the individual's ability to think for themselves

Emerging Technology

Intel Corp. uses InSb to realize high-speed operation that surpasses silicon-based FET

Keyword

LER/LWR

Keyperson

NAND flash memory demand will continue to grow still further

Inside LSI (I EDM Report)

A series of novel nonvolatile memory technologies make their debut
Breakthrough seen in new materials and new operation principles

Inside LSI

IBM develops timing analysis and at-speed test for 65nm ASIC that take into consideration process variation

Inside FPD

Technology to produce large-screen displays at low cost

Report(LSI)

RET extends the life of ArF immersion; coordination with DFM becomes more important

Report(LSI)

Neutral beam process controls damage, improving device property beyond 32nm

Report FPD(CES)

A number of 100-inch scale living room televisions make an appearance; specifics on mobile televisions unveiled

SoC Story

Hitachi's LSI for DVD recorders enables simultaneous recording of two HD (high definition) programs

Tutorial

Overview of process equipment technology analyzed through the front-runner (1): Introduction

New Products

Wafer analyzer tool/Mizuho Information & Research Institute

UV thermal processing system/Novellus Systems, Inc.

Automated wafer inspection system/KLA-Tencor Corp.

Polymer ring frame/Shin-Etsu Polymer Co., Ltd.

Automatic vacuum tape mounter/NEC Engineering,Ltd.

Memory LSI Tester with Separately Operated Two Test Heads/Yokogawa Electric Corp.

Interview

Sanyo Aqua Technology's wastewater treatment business strategy for LSI plants

Report FPD

Matsushita Electric Industrial to build a new PDP plant

Challenger

"We will not let EDA development engineers disappear from Japan"