December 2006

Cover Story

Indian power in LSI design

Special Feature

Immersion lithography and 32nm development drive business opportunity for devices and material/component

Inside LSI

Understanding what really lies below the disturbing signs in the semiconductor industry Part 2: Stagnant microfabrication requires industrial restructuring

Report LSI

Twenty times faster data distribution and usage between design and production

Report LSI

Biggest ever vertical furnace project utilizing single-wafer system features

Report LSI

Mid-term financial statements of LSI/FPD manufacturers

Inside FPD

Winner of FPD business will be determined by the 50-inch class display market

Report FPD

Lens-like new diffusing plate reduces required optical sheets

Inside MEMS

Explore the power of mass-produced MEMS resonator

Report MEMS

Exhibition Micromachine newsflasht

Tutorial

Last in the series / Inspection and analysis: Visualization of atoms and atom ratio delivers early yield improvements

Emerging Technology

Significant LER reduction at EUV lithographing with 28nm resolution using low-molecular resist

Keyword

Bevel

Key Person

TV strategy in China by TCL

Interview

Future prospect of solar battery business